Hybrid dielectrics for two-dimensional electronics

Nature Materials, Published online: 29 August 2023; doi:10.1038/s41563-023-01642-w

Using the van der Waals crystal Sb2O3 as a buffer layer enables the growth of high-κ dielectrics on two-dimensional materials via atomic layer deposition.Nature Materials, Published online: 29 August 2023; doi:10.1038/s41563-023-01642-wUsing the van der Waals crystal Sb2O3 as a buffer layer enables the growth of high-κ dielectrics on two-dimensional materials via atomic layer deposition. Read More